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English Title: Theory of X-Ray Diffraction on a Crystall with Surface Relief
Contributor(s): Karpov, A V (author); Kazakov, D V (author); Pavlov, Konstantin M  (author)orcid ; Punegov, V I (author)
Publication Date: 2018
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Abstract: It is well known that surface diffraction gratings are commonly used in X-ray optics [1], opto- and nanoelectronics [2]. Surface diffraction gratings are an optical component with a periodic structure formed on crystal surface. Thin 0.2 μm surface gratings with period of 10-20 μm were for the first time studied by Aristov et al. [3,4] on a triple-axis diffractometer. Results of X-ray diffraction on InP and GaAs crystals with significantly shorter surface relief period were reported in papers [5-7]. The purpose of the current paper is to provide further development of the coplanar X-ray diffraction theory on surface diffraction gratings. The problem is formulated in general within the framework of two-wave dynamic X-ray diffraction. Stroke profile can be specified in any shape. Since the period and the thickness of the surface relief do not exceed 1 μm, we can study it using the kinematic approximation. New stroke profile models for specific surface reliefs are proposed. These models were used to solve the X-ray diffraction problem analytically in the kinematic approximation. Boundaries of applicability for every solution were indicated. Those solutions may be used to reconstruct profile models from experimental data of high-resolution X-ray diffraction. Results of the current work are applicable to the X-ray and neutron optic studies.
Publication Type: Journal Article
Source of Publication: Известия Коми научного центра УрО РАН, 33(1), p. 5-12
Publisher: Komi Science Centre of the Ural Division of the Russian Academy of Sciences
Place of Publication: Russian Federation
ISSN: 1994-5655
Field of Research (FOR): 020499 Condensed Matter Physics not elsewhere classified
020401 Condensed Matter Characterisation Technique Development
020599 Optical Physics not elsewhere classified
Socio-Economic Outcome Codes: 970102 Expanding Knowledge in the Physical Sciences
Peer Reviewed: Yes
HERDC Category Description: C1 Refereed Article in a Scholarly Journal
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