ТЕОРИЯ РЕНТГЕНОВСКОЙ ДИФРАКЦИИ НА КРИСТАЛЛЕ С ПОВЕРХНОСТНЫМ РЕЛЬЕФОМ

Title
ТЕОРИЯ РЕНТГЕНОВСКОЙ ДИФРАКЦИИ НА КРИСТАЛЛЕ С ПОВЕРХНОСТНЫМ РЕЛЬЕФОМ
Publication Date
2018
Author(s)
Karpov, A V
Kazakov, D V
Pavlov, Konstantin M
( author )
OrcID: https://orcid.org/0000-0002-1756-4406
Email: kpavlov@une.edu.au
UNE Id une-id:kpavlov
Punegov, V I
Type of document
Journal Article
Language
ru
Entity Type
Publication
Publisher
Komi Science Centre of the Ural Division of the Russian Academy of Sciences
Place of publication
Russia
UNE publication id
une:23484
Abstract
It is well known that surface diffraction gratings are commonly used in X-ray optics [1], opto- and nanoelectronics [2]. Surface diffraction gratings are an optical component with a periodic structure formed on crystal surface. Thin 0.2 μm surface gratings with period of 10-20 μm were for the first time studied by Aristov et al. [3,4] on a triple-axis diffractometer. Results of X-ray diffraction on InP and GaAs crystals with significantly shorter surface relief period were reported in papers [5-7]. The purpose of the current paper is to provide further development of the coplanar X-ray diffraction theory on surface diffraction gratings. The problem is formulated in general within the framework of two-wave dynamic X-ray diffraction. Stroke profile can be specified in any shape. Since the period and the thickness of the surface relief do not exceed 1 μm, we can study it using the kinematic approximation. New stroke profile models for specific surface reliefs are proposed. These models were used to solve the X-ray diffraction problem analytically in the kinematic approximation. Boundaries of applicability for every solution were indicated. Those solutions may be used to reconstruct profile models from experimental data of high-resolution X-ray diffraction. Results of the current work are applicable to the X-ray and neutron optic studies.
Link
Citation
Известия Коми научного центра УрО РАН, 33(1), p. 5-12
ISSN
1994-5655
Start page
5
End page
12

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